Webincluding photolithography, plasma and reactive ion etching, ion implantation, diffusion, oxidation, evaporation, vapor phase epitaxial growth, sputtering and chemical vapor deposition. ... Fundamentals of Optical Waveguides - Katsunari Okamoto 2000-02-04 "Fundamentals of Optical Waveguides" gives a complete theoretical basis of Web31 jan. 2011 · Planar waveguide was fabricated in Er:Yb:phosphate glass by a single energy implantation of 2.5 MeV He + at a dose of 1.6 × 10 16 ions/cm 2. The waveguide was characterized by prism coupling method, and the refractive index profile was reconstructed using the inverse Wentzel-Kramers-Brillouin method. The …
Ge Ion Implanted Photonic Devices and Annealing for
WebFollowing the first systematic studies of damage-induced refractive index variation at a fixed wavelength [10] and the demonstration of waveguide fabrication in diamond with ion implantation [4], the dependence of refractive index variation upon structural damage needs to be systematically explored in a wide wavelength range for a broader spectrum … Web15 sep. 2024 · Ion implantation is a competitive technique for surface modification of materials [10]. It has become one of the most effective methods for the fabrication of … phillips p. obrien twitter
Modification of sol-gel TiO2 planar waveguides by Xe+ irradiation
WebIon implantation is a competitive waveguide preparation technique with advantages including reliance, simpleness and flexibility. In this work, a 400-keV helium ion implantation with a fluence of 6. 0 × 1 0 1 6 ions/cm 2 was carried out to manufacture a planar waveguide on the surface of the fused silica glass. Web1 sep. 2001 · Ion implantation is a promising technique to write optical waveguides for integrated optics. Ion implantation into crystalline insulating material leads to a … WebThe ion implanted waveguide technique is sorted to two different strategies named light-ion implantation and heavy-ion implantation, according to the mass of implanted ions. The ions used in the light-ion implantation are protons or Helium ions, however, the ions used in the heavy one usually are C +, O + and Cu +. phillips pm 3261